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Vacuum Coating System Aluminum Chamber Series AluVac260/360/460

Vacuum Coating System Aluminum Chamber Series AluVac260/360/460

The AluVac series features a high-quality aluminum square chamber with ample internal space. Up to 16 evaporation material groups can be configured to meet complex deposition requirements. When paired with a turbomolecular pump, the system achieves a vacuum better than 5×10⁻⁴ Pa, suitable for most evaporation materials. It includes an fully automatic vacuum pumping system with one-click software control, enabling intelligent activation of the mechanical pump, turbomolecular pump, gate valve, and

Product Detail

Description

The AluVac series delivers an evaporation current of up to 200 A and a maximum evaporation temperature of 600°C, meeting the requirements for most organic material deposition (higher temperatures available on request). The high-quality aluminum square chamber provides generous internal space. Up to 16 evaporation material groups can be configured for complex deposition needs. When paired with a turbomolecular pump, the system achieves a vacuum better than 5×10⁻⁴ Pa, suitable for most evaporation materials.

Key Features

Automatic mask exchange system

Automatic chamber opening/closing, vacuum pumping, and venting

Automated deposition process

Comprehensive error detection system

Excellent film thickness uniformity

Customization available

Applications

Organic thin film fabrication

Semiconductor thin film deposition

Optical coating

Metal electrode deposition

Typical samples: OLEDs, perovskites, thin-film batteries, thin-film transistors (TFTs)

Specifications

Number of evaporation sources: 2 – 16 (optional)

Evaporation current: 0 – 200 A, continuously adjustable

Evaporation power modules: 1 – 10 sets (optional); power ratings: 600 W, 1200 W, 1500 W (optional)

Ultimate vacuum: Better than 4×10⁻⁵ Pa

Sample-to-source distance: Fixed or adjustable 0 – 70 mm

Tungsten boat shutters: Standard with evaporation sources; 2 – 16 sets

Pressure protection: Imported pressure switch with adjustable positive/negative pressure settings for effective vacuum environment protection

Pumping speed: Atmospheric pressure to 5×10⁻² Pa in ≤ 10 min

Mask bank: 4, 6, or 8 positions (optional)

Vacuum retention: ≤ 2 Pa after 12 hours with vacuum system off

Door control: Manual or manual/automatic integrated (optional)

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