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Stainless Steel Vacuum Coating System SteeVac260/360/460

Stainless Steel Vacuum Coating System SteeVac260/360/460

The SteeVac series delivers an evaporation current of up to 200 A and a maximum evaporation temperature of 600°C, meeting the requirements for most organic material deposition. Higher temperatures are available upon request. The vacuum chamber is constructed from high-quality stainless steel with a square design for ample internal space. Up to 16 evaporation material groups can be configured to accommodate complex deposition conditions.

Product Detail

Description

The SteeVac series supports up to 200 A evaporation current and 600°C evaporation temperature, suitable for most organic material deposition (higher temperatures available on request). The stainless steel square chamber provides generous internal space. Up to 16 evaporation material groups can be configured for complex deposition needs. When paired with a turbomolecular pump, the system achieves a vacuum better than 5×10⁻⁴ Pa, suitable for most evaporation materials. It features a fully automatic vacuum pumping system with one-click software control, which intelligently activates the mechanical pump, turbomolecular pump, gate valve, and solenoid valves based on real-time vacuum monitoring. An automatic glovebox anti-rupture detection system is also included.

Key Features

Automatic mask exchange system

Automatic chamber opening/closing, vacuum pumping, and venting

Automated deposition process

Comprehensive error detection system

Excellent film thickness uniformity

Customization available

Applications

Organic thin film fabrication

Semiconductor thin film deposition

Optical coating

Metal electrode deposition

Typical samples: OLEDs, perovskites, thin-film batteries, thin-film transistors (TFTs)

Specifications

Number of evaporation sources: 2 – 16 (optional)

Evaporation current: 0 – 200 A, continuously adjustable

Evaporation power modules: 1 – 10 sets (optional); power ratings: 600 W, 1200 W, 1500 W (optional)

Ultimate vacuum: Better than 4×10⁻⁵ Pa

Sample-to-source distance: Fixed or adjustable 0 – 70 mm

Tungsten boat shutters: Standard with evaporation sources; 2 – 16 sets

Pressure protection: Imported pressure switch with adjustable positive/negative pressure settings for effective vacuum environment protection

Pumping speed: Atmospheric pressure to 5×10⁻² Pa in ≤ 10 min

Mask bank: 4, 6, or 8 positions (optional)

Vacuum retention: ≤ 2 Pa after 12 hours with vacuum system off

Door control: Manual or manual/automatic integrated (optional)

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